[labnetwork] Facility Process Vac

[Morrison, Richard H., Jr.]

Hi,

We have a high flow system with a 250 gallon buffer tank for our house vacuum system. We use EBARA Dry Pumps EV-A10-3 running for 2 years with no issues. We went dry to eliminate oil leaks of our rotary pumps and we reduced the noise by 50%

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461




From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bryant Colwill
Sent: Wednesday, August 12, 2015 12:54 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Facility Process Vac

Colleagues,

We are in need of repairing/replacing our cleanroom process vacuum pumps.
Currently, we use a water sealed rotary vane system but it has been suggested to convert to a oil sealed rotary screw style pump.
We target an ultimate vacuum of 28mmHg and our volume requirements, at point of use, are quite small (a couple spin chucks, end effectors, etc.).  Can anyone attest to having a rotary screw pump installed for this purpose that has withstood the test of time?  Any issues with premature/frequent bearing failure or replacement?  Also, does changing from water sealed to oil sealed set off any red flags?

Thanks in advance,
Bryant

Bryant Colwill
MNCR General Manager
Rensselaer Polytechnic Institute
110 8th Street, CII 6015
Troy, NY 12180
Ph: 518-276-3946<tel:518-276-3946>
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