[labnetwork] Facility Process Vac

[Robert M. HAMILTON]

Bryan Colwill,

I suspect you can relax your vacuum spec. At 28" (~50 Torr) you will have
93% of the atmospheric force available for wafer handling. Our facility
vacillates between 25" and 28" during the day, based on load. We and have
not seen a problem from this swing.

Note, our housevac is never used for actual process, just wafer handling.

The UC Berkeley NanoLab uses a Busch rotary-vane system built for
"housevac". It is reliable; however, we did modify the oil recovery tubing
(1/8") which collects oil and returns it to the sump, changing it from
steel to translucent plastic tubing. This modification makes it easy to see
this recovery system is working and not clogged.

Regards,
Bob Hamilton




Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/



On Tue, Aug 11, 2015 at 9:53 PM, Bryant Colwill <colwib2 at rpi.edu> wrote:

> Colleagues,
>
> We are in need of repairing/replacing our cleanroom process vacuum pumps.
> Currently, we use a water sealed rotary vane system but it has been
> suggested to convert to a oil sealed rotary screw style pump.
> We target an ultimate vacuum of 28mmHg and our volume requirements, at
> point of use, are quite small (a couple spin chucks, end effectors, etc.).
> Can anyone attest to having a rotary screw pump installed for this purpose
> that has withstood the test of time?  Any issues with premature/frequent
> bearing failure or replacement?  Also, does changing from water sealed to
> oil sealed set off any red flags?
>
> Thanks in advance,
> Bryant
>
> Bryant Colwill
> MNCR General Manager
> Rensselaer Polytechnic Institute
> 110 8th Street, CII 6015
> Troy, NY 12180
> Ph: 518-276-3946
>
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