[labnetwork] Cool grease used in DRIE

[savitha.p at ece.iisc.ernet.in]

Hi!

Currently we are using cool grease for sticking small samples to carrier
wafers for DRIE processing.Is there any other method that can be used,
instead of cool grease to stick small samples? We are finding it very
difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in

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