[labnetwork] Cool grease used in DRIE

[Noah Clay]

Savitha,

We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.

Noah Clay 

Quattrone Nanofabrication Facility 
University of Pennsylvania 
Philadelphia, PA


Sent from my iPhone

> On Aug 15, 2015, at 04:00, Mariusz Martyniuk <mariusz.martyniuk at uwa.edu.au> wrote:
> 
> Fomblin oil or gallium. 
> 
> Mariusz Martyniuk
> -----------------------------
> Associate Professor, ANFF-WA Managing Director
> Microelectronics Research Group
> School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
> The University of Western Australia
> 35 Stirling Highway, Crawley WA 6009, Australia
> Tel: +61 8 6488 1905, Fax: +61 8 6488 1095
> Secretary Tel: +61 8 6488 3801, Rm 1.73, http://mrg.ee.uwa.edu.au
> 
> 
> -------- Original message --------
> From: savitha.p at ece.iisc.ernet.in 
> Date: 15/08/2015 08:50 (GMT+08:00) 
> To: labnetwork at mtl.mit.edu 
> Subject: Re: [labnetwork] Cool grease used in DRIE 
> 
> Hi!
> 
> Currently we are using cool grease for sticking small samples to carrier
> wafers for DRIE processing.Is there any other method that can be used,
> instead of cool grease to stick small samples? We are finding it very
> difficult to remove the cool grease.
> 
> Thanks and regards,
> 
> Savitha
> 
> ___________________________________________________________
> 
> Dr.Savitha P,
> Technology Manager
> National Nanofabrication Centre,
> Centre for Nanoscience and Engineering
> Indian Institute of Science
> Bangalore - 560012
> India.
> Ph: +91 80 2293 3254
> www.cense.iisc.ernet.in
> 
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