[labnetwork] Cool grease used in DRIE

[julia.aebersold at louisville.edu]

We also use crystal bond and some folks like to use photoresist.


Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292



(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Noah Clay [nclay at upenn.edu]
Sent: Saturday, August 15, 2015 10:40 AM
To: Mariusz Martyniuk
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cool grease used in DRIE

Savitha,

We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.

Noah Clay

Quattrone Nanofabrication Facility
University of Pennsylvania
Philadelphia, PA


Sent from my iPhone

On Aug 15, 2015, at 04:00, Mariusz Martyniuk <mariusz.martyniuk at uwa.edu.au<mailto:mariusz.martyniuk at uwa.edu.au>> wrote:

Fomblin oil or gallium.

Mariusz Martyniuk
-----------------------------
Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia<UrlBlockedError.aspx>
Tel: +61 8 6488 1905<tel:+61%208%206488%201905>, Fax: +61 8 6488 1095<tel:+61%208%206488%201095>
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-------- Original message --------
From: savitha.p at ece.iisc.ernet.in<mailto:savitha.p at ece.iisc.ernet.in>
Date: 15/08/2015 08:50 (GMT+08:00)
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Cool grease used in DRIE

Hi!

Currently we are using cool grease for sticking small samples to carrier
wafers for DRIE processing.Is there any other method that can be used,
instead of cool grease to stick small samples? We are finding it very
difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.cense.iisc.ernet.in&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=glBzB3ThRd-n6JDi4l7HdZbROd4etVNY8vVIkzS4S6I&s=UPr1fxJ884b4j5JYjlN2CRtWapMCA45v0u1nalgyJpQ&e=>

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