[labnetwork] Cool grease used in DRIE

[rvanduse]

Hi. 
We used to use photoresist but had issues with thermal conductivity on our -50 deg C etch. We switched to double sided carbon tape (which is found at SEM supply stores). You just have to be careful to cut it slightly smaller than the sample to avoid exposing it to the etch plasma. Removal can be tricky but heating to around 100 C on a hotplate or with a heat gun  helps to peel it off

Rob Vandusen
Facility Manager
Carleton University
Microfabrication Labs
Ottawa, Canada



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We also use crystal bond and some folks like to use photoresist.

Cheers!


Julia Aebersold, Ph.D.

MNTC Cleanroom Manager

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

 

(502) 852-1572

http://louisville.edu/micronano/


From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Noah Clay [nclay at upenn.edu]
Sent: Saturday, August 15, 2015 10:40 AM
To: Mariusz Martyniuk
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cool grease used in DRIE

Savitha,

We use crystalbond in our SPTS Rapier, typical chuck temperature -5C to 20C.

Noah Clay 

Quattrone Nanofabrication Facility 
University of Pennsylvania 
Philadelphia, PA


Sent from my iPhone

On Aug 15, 2015, at 04:00, Mariusz Martyniuk <mariusz.martyniuk at uwa.edu.au> wrote:

Fomblin oil or gallium. 

Mariusz Martyniuk
-----------------------------
Associate Professor, ANFF-WA Managing Director
Microelectronics Research Group
School of Electrical, Electronic & Computer Engineering, Rm 4.17, M018
The University of Western Australia
35 Stirling Highway, Crawley WA 6009, Australia
Tel: +61 8 6488 1905, Fax: +61 8 6488 1095
Secretary Tel: +61 8 6488 3801, Rm 1.73, The MTL Mail Server has detected a possible fraud attempt from "urldefense.proofpoint.com" claiming to be http://mrg.ee.uwa.edu.au


-------- Original message --------
From: savitha.p at ece.iisc.ernet.in 
Date: 15/08/2015 08:50 (GMT+08:00) 
To: labnetwork at mtl.mit.edu 
Subject: Re: [labnetwork] Cool grease used in DRIE 

Hi!

Currently we are using cool grease for sticking small samples to carrier
wafers for DRIE processing.Is there any other method that can be used,
instead of cool grease to stick small samples? We are finding it very
difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
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