[labnetwork] Cool grease used in DRIE

[Lapointe, Jean]

Hello,
We use diffusion pump oil Santovac 5 in our ICP etchers. It is easily cleaned with acetone.

Jean

Dr Jean Lapointe
ICT portfolio,
National Research Council, Canada



-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of savitha.p at ece.iisc.ernet.in
Sent: Friday, August 14, 2015 12:26 PM
To: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Cool grease used in DRIE

Hi!

Currently we are using cool grease for sticking small samples to carrier wafers for DRIE processing.Is there any other method that can be used, instead of cool grease to stick small samples? We are finding it very difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in

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