[labnetwork] Cool grease used in DRIE

[Mike Young]

We used Mung II decades ago for mounting samples in a big old ion mill. Never really figured out what was in the stuff, but it worked:

http://www.intlvac.com/products/ion-beam-system-parts-accessories/thermal-management/mung-thermal-paste


> On Aug 14, 2015, at 12:26 PM, savitha.p at ece.iisc.ernet.in wrote:
> 
> Hi!
> 
> Currently we are using cool grease for sticking small samples to carrier
> wafers for DRIE processing.Is there any other method that can be used,
> instead of cool grease to stick small samples? We are finding it very
> difficult to remove the cool grease.
> 
> Thanks and regards,
> 
> Savitha
> 
> ___________________________________________________________
> 
> Dr.Savitha P,
> Technology Manager
> National Nanofabrication Centre,
> Centre for Nanoscience and Engineering
> Indian Institute of Science
> Bangalore - 560012
> India.
> Ph: +91 80 2293 3254
> www.cense.iisc.ernet.in
> 
> -- 
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-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-6302 (cell)
University of Notre Dame                         mike.young at nd.edu
B-38 Stinson-Remick Hall
Notre Dame, IN 46556-5637

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