[labnetwork] Cool grease used in DRIE

[Bob Henderson]

Savitha:

 

A good method is to use a drop of Fomblin oil. Since it is very thin it
makes for a good thermal transfer mechanism. It cleans off well in a soap
called Simple Green and water. Bob Henderson

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu]
On Behalf Of Mike Young
Sent: Monday, August 17, 2015 1:49 PM
To: Labnetwork
Subject: Re: [labnetwork] Cool grease used in DRIE

 

We used Mung II decades ago for mounting samples in a big old ion mill.
Never really figured out what was in the stuff, but it worked:

 

http://www.intlvac.com/products/ion-beam-system-parts-accessories/thermal-ma
nagement/mung-thermal-paste

 

 

On Aug 14, 2015, at 12:26 PM, savitha.p at ece.iisc.ernet.in wrote:

 

Hi!

Currently we are using cool grease for sticking small samples to carrier
wafers for DRIE processing.Is there any other method that can be used,
instead of cool grease to stick small samples? We are finding it very
difficult to remove the cool grease.

Thanks and regards,

Savitha

___________________________________________________________

Dr.Savitha P,
Technology Manager
National Nanofabrication Centre,
Centre for Nanoscience and Engineering
Indian Institute of Science
Bangalore - 560012
India.
Ph: +91 80 2293 3254
www.cense.iisc.ernet.in

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-- 
Michael P. Young                                (574) 631-3268 (office)
Nanofabrication Specialist                      (574) 631-4393 (fax)
Department of Electrical Engineering            (765) 637-6302 (cell)
University of Notre Dame                         mike.young at nd.edu
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Notre Dame, IN 46556-5637

 

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