[labnetwork] Cool grease used in DRIE

[sunanda.babu at cense.iisc.ernet.in]

But, do these methods work if cool grease or fomblin oil etc, needs to be
applied on the device side of the wafer or sample?


 Savitha:
>
>
>
> A good method is to use a drop of Fomblin oil. Since it is very thin it
> makes for a good thermal transfer mechanism. It cleans off well in a soap
> called Simple Green and water. Bob Henderson
>
>
>
>
>
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of Mike Young
> Sent: Monday, August 17, 2015 1:49 PM
> To: Labnetwork
> Subject: Re: [labnetwork] Cool grease used in DRIE
>
>
>
> We used Mung II decades ago for mounting samples in a big old ion mill.
> Never really figured out what was in the stuff, but it worked:
>
>
>
> http://www.intlvac.com/products/ion-beam-system-parts-accessories/thermal-ma
> nagement/mung-thermal-paste
>
>
>
>
>
> On Aug 14, 2015, at 12:26 PM, savitha.p at ece.iisc.ernet.in wrote:
>
>
>
> Hi!
>
> Currently we are using cool grease for sticking small samples to carrier
> wafers for DRIE processing.Is there any other method that can be used,
> instead of cool grease to stick small samples? We are finding it very
> difficult to remove the cool grease.
>
> Thanks and regards,
>
> Savitha
>
> ___________________________________________________________
>
> Dr.Savitha P,
> Technology Manager
> National Nanofabrication Centre,
> Centre for Nanoscience and Engineering
> Indian Institute of Science
> Bangalore - 560012
> India.
> Ph: +91 80 2293 3254
> www.cense.iisc.ernet.in
>
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> --
> Michael P. Young                                (574) 631-3268 (office)
> Nanofabrication Specialist                      (574) 631-4393 (fax)
> Department of Electrical Engineering            (765) 637-6302 (cell)
> University of Notre Dame                         mike.young at nd.edu
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