[labnetwork] HF vapor etch
Christophe Clément
christophe.clement at polymtl.ca
Fri Dec 4 07:35:31 EST 2015
Hi Richard
Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
Consult the tool at http://www.idonus.com/
Best
Christophe
Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca
Ecole Polytechnique de Montréal <http://www.polymtl.ca/> www.polymtl.ca
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4
* <mailto:christophe.clement at polymtl.ca> christophe.clement at polymtl.ca
* 514 340 4711
Fax : 514 340 4711 # 2417
De : Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
Envoyé : 3 décembre 2015 13:21
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] HF vapor etch
Hi Folks,
I am looking for a HF vapor release tool, I see that OAI and SPTS are the
2 manufactures out there, any recommendations or other suppliers?
thanks in advance
Rick
Draper
Principal Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563
www.draper.com <http://www.draper.com>
rmorrison at draper.com <mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461
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