[labnetwork] HF vapor etch

[Paul Maciel]

Hi Everyone,

OAI (Optical Associates, Incorporated) is the distributor for Idonus products in North America.  Please let me know if you need anything.

Regards,
---Paul

Paul Maciel
Optical Associates, Incorporated
Sales and Technical Support
(408) 514-6121
pmaciel at oainet.com<mailto:pmaciel at oainet.com>
http://www.oainet.com<http://www.oainet.com/>



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Christophe Clément
Sent: Friday, December 04, 2015 7:36 AM
To: Morrison, Richard H., Jr. <rmorrison at draper.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] HF vapor etch

Hi Richard
Here at Polytechnique Montreal, we have an Idonus HF vapor phase etcher.
Consult the tool at http://www.idonus.com/
Best
Christophe

Christophe Clément
Technicien laboratoire
Laboratoire de microfabrication (LMF)
Groupe des Couches Minces (GCM) www.gcmlab.ca<http://www.gcmlab.ca>
Ecole Polytechnique de Montréal www.polymtl.ca<http://www.polymtl.ca/>
Département de génie physique
* 2900 Boulevard Edouard Monpetit
Pavillon JAB
Campus de l'Université de Montréal
Montréal (Québec) H3T 1J4

* christophe.clement at polymtl.ca<mailto:christophe.clement at polymtl.ca>
* 514 340 4711
Fax : 514 340 4711 # 2417


De : Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
Envoyé : 3 décembre 2015 13:21
À : labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Objet : [labnetwork] HF vapor etch

Hi Folks,

I am  looking for a HF vapor release tool, I see that OAI and SPTS are the 2 manufactures out there, any recommendations or other suppliers?

thanks in advance

Rick


Draper
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461

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