[labnetwork] Thermal Conductivity of PECVD SiON

[Fouad Karouta]

Dear all,



We have a user who's looking for a method to measure the lateral thermal conductivity of SiON layers of a few 100 nm thickness.



I appreciate your feedback/comments.



Thanks,

Fouad Karouta

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Manager ANFF ACT Node
Australian National Fabrication Facility
Research School of Physics and Engineering
L. Huxley Building (#56), Mills Road, Room 4.02
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Email: fouad.karouta at anu.edu.au<mailto:fouad.karouta at anu.edu.au>
http://anff-act.anu.edu.au/
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