[labnetwork] IPA 100°C clean

Matthieu Nannini nannini.matthieu at gmail.com
Fri Dec 18 12:01:20 EST 2015


Hi,

An old process I'm trying to reproduce calls for a 5min clean step in IPA
at 100°C. I'm a bit nervous about it. I'm doing it at 50-60C in bain-marie
but I'm wondering it will make a difference. It's a cleaning step prior to
photoresist and other things.

What do you folks think?

Matthieu
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20151218/54be9835/attachment.html>


More information about the labnetwork mailing list