[labnetwork] Cambridge ALD Precursor Vendor

[Hathaway, Malcolm]

Hi Mark,

Echoing the comments from others...

Strem Chemical of Newburyport, MA is our preferred vendor for most of our precursors, including TMA.  They have it in "Cambridge" style cylinders.

As it happens, we fill our own, with a glove box.  Empty cylinders can be purchased in 3 pieces (cylinder, VCR weldment, and VCR nut) from Swagelok, for much cheaper than Strem and Sigma will sell them for.  We just have our gas plumbing guys (New England Orbital) do a quick orbital weld and test them, and we're good to go, for about... $150-$200, as I recall...

Mac
Harvard CNS
________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Mark Heiden [mheiden at engr.ucr.edu]
Sent: Wednesday, February 11, 2015 6:11 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cambridge ALD Precursor Vendor

Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich?

We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable..

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


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