[labnetwork] Cambridge ALD Precursor Vendor

Mark Heiden mheiden at engr.ucr.edu
Thu Feb 12 12:33:47 EST 2015


Thank you all for your quick responses..Looks like Strem is the first choice.

Best,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551



From: Morrison, Richard H., Jr. [mailto:rmorrison at draper.com]
Sent: Thursday, February 12, 2015 4:00 AM
To: Mark Heiden; labnetwork at mtl.mit.edu
Subject: RE: Cambridge ALD Precursor Vendor

HI,

We use a company called STREM Chemicals they may be able to fill your cartridge.  Their contact email is sandy at strem.com<mailto:sandy at strem.com>

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461




From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Mark Heiden
Sent: Wednesday, February 11, 2015 6:12 PM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cambridge ALD Precursor Vendor

Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich?

We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable..

Thanks in advance,


Mark Heiden
NanoFab Cleanroom Manager
Center for Nanoscale Science and Engineering
University of California, Riverside
951-827-2551


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