[labnetwork] Cambridge ALD Precursor Vendor

[Noah Clay]

Mark,

Try ordering the lower purity TMAH from Sigma.  The results will be the same and it ships quickly.  We learned from the Harvard Nanofab (Mac Hathaway) that you can buy this in larger quantities and pour it in your own glove boxes.  I think this is the right link:

http://www.sigmaaldrich.com/catalog/product/aldrich/257222?lang=en&region=US <http://www.sigmaaldrich.com/catalog/product/aldrich/257222?lang=en&region=US>

We had your experience as well…long lead times, tried the competition and weren’t impressed.  Your best bet is to buy large, warehouse on site, save your empty precursor bottles and refill within as needed.

My two cents, FWIW.

Best,
Noah Clay

Quattrone Nanofabrication Facility
School of Engineering & Applied Science
University of Pennsylvania

> On Feb 12, 2015, at 8:53 AM, J Provine <jprovine at stanford.edu> wrote:
> 
> In addition to strem you can use geleste and air liquids as alternatives. 
> J
> 
> On Thursday, February 12, 2015, Morrison, Richard H., Jr. <rmorrison at draper.com <mailto:rmorrison at draper.com>> wrote:
> HI,
> 
>  
> 
> We use a company called STREM Chemicals they may be able to fill your cartridge.  Their contact email is sandy at strem.com <javascript:_e(%7B%7D,'cvml','sandy at strem.com');>
>  
> 
> Rick
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>  
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>  
> 
> Draper Laboratory
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> Principal  Member of the Technical Staff
> 
> Group Leader Microfabrication Operations
> 
> 555 Technology Square
> 
> Cambridge Ma, 02139-3563
> 
>  
> 
> www.draper.com <http://www.draper.com/>
> rmorrison at draper.com <javascript:_e(%7B%7D,'cvml','rmorrison at draper.com');>
> W 617-258-3420
> 
> C 508-930-3461
> 
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> From: labnetwork-bounces at mtl.mit.edu <javascript:_e(%7B%7D,'cvml','labnetwork-bounces at mtl.mit.edu');> [mailto:labnetwork-bounces at mtl.mit.edu <javascript:_e(%7B%7D,'cvml','labnetwork-bounces at mtl.mit.edu');>] On Behalf Of Mark Heiden
> Sent: Wednesday, February 11, 2015 6:12 PM
> To: labnetwork at mtl.mit.edu <javascript:_e(%7B%7D,'cvml','labnetwork at mtl.mit.edu');>
> Subject: [labnetwork] Cambridge ALD Precursor Vendor
> 
>  
> 
> Has anyone found an alternate vendor for precursors packaged for Cambridge Labs ALD systems besides Sigma Aldrich?
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> 
> We currently have a delivery date for a standard aluminum (TMAH) cartridge that is in June 2015. Not acceptable..
> 
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> 
> Thanks in advance,
> 
>  
> 
>  
> 
> Mark Heiden
> 
> NanoFab Cleanroom Manager
> 
> Center for Nanoscale Science and Engineering
> 
> University of California, Riverside
> 
> 951-827-2551
> 
>  
> 
>  
> 
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