[labnetwork] expired process gas

[Himmer, Phil]

Hello


Thanks to all for your input about the expired gas. The general consensus is that expiration dates are not relevant for process stability so I’ll continue using what I have.

regards
phil




Dr. Phillip Himmer
Manager Montana Microfabrication Facility
Montana State University
Bozeman Mt 59717

Office Ph: 406-994-7178
email: philh at ece.montana.edu<mailto:philh at ece.montana.edu>



On Jan 7, 2015, at 2:44 PM, Janney, Peter J. <janney.9 at osu.edu<mailto:janney.9 at osu.edu>> wrote:

It's my understanding that the gas doesn't really expire, it's only the certification on the tank.


--
Pete Janney


-------- Original message --------
From: "Himmer, Phil"
Date:01/07/2015 2:14 PM (GMT-05:00)
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] expired process gas

Hello,

Does anyone have any practical experience using Chlorine and Hydrogen Bromide gas past it’s expiration date? We use the gas for ICP etching of chrome and aluminum.
We have small cylinders(air liquide 7-size) of each that still have gas in them but are now years past the expiration date. I have pulled them from the gas cabinet with the plan to replace them but am having difficulty finding a vendor who offers these gasses in these small volumes. We are trying to not use lecture bottles due to disposal considerations.

looking forward to suggestions
phil


Dr. Phillip Himmer
Manager Montana Microfabrication Facility
Montana State University
Bozeman Mt 59717

Office Ph: 406-994-7178
email: philh at ece.montana.edu<mailto:philh at ece.montana.edu>




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