[labnetwork] KLA Tencor FLX 2320 Stress Measurement System
Harold Gilles
hgilles at wisc.edu
Mon Jul 20 08:09:07 EDT 2015
All,
The 2320 system uses a 750 laser that will fail and is no longer available. The replacement is a 780 laser. Has anyone gone through the process of upgrading to the 780 laser? Is it simply a hardware change with some adjustment to software parameters or did it require a change/upgrade in software as well? If you had the upgrade done, who did you work with to do it?
Thanks in advance,
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Hal Gilles
Wisconsin Center For Applied Microelectronics
Office rm 3114
608-890-4573
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