[labnetwork] KLA Tencor FLX 2320 Stress Measurement System

[Brian Armstrong]

Hi Hal,



We work with Toho Technology (http://www.tohotechnology.com) for service on
our FLX-2320.  I believe they own rights to this tool now.  Our system
already has the 780nm laser.  If it was upgraded, it was before my time
here.



My contact is Lan Phan  lan.phan at tohotechnology.com



Good luck!



Best Regards,

Brian Armstrong



Lead Engineer in Research

Lurie Nanofabrication Facility (LNF)

University of Michigan
1301 Beal Ave, 1245 EECS
Ann Arbor, MI 48109-2122

Office:  (734) 615-7539

Cell:  (734) 323-0137

Fax:  (734) 647-1781

http://www.lnf.umich.edu







*From:* labnetwork-bounces at mtl.mit.edu [mailto:
labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Harold Gilles
*Sent:* Monday, July 20, 2015 8:09 AM
*To:* labnetwork at mtl.mit.edu
*Subject:* [labnetwork] KLA Tencor FLX 2320 Stress Measurement System



All,

The 2320 system uses a 750 laser that will fail and is no longer available.
The replacement is a 780 laser.  Has anyone gone through the process of
upgrading to the 780 laser? Is it simply a hardware change with some
adjustment to software parameters or did it require a change/upgrade in
software as well? If you had the upgrade done, who did you work with to do
it?



Thanks in advance,



Hal Gilles
Wisconsin Center For Applied Microelectronics

Office rm 3114
608-890-4573
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