[labnetwork] Nitrogen Purity for Sputtering

[Dennis Schweiger]

Mark,

one thing you might consider is a point of use purifier. Something like
this;

http://www.saespuregas.com/Products/Gas-Purifier/Rare-Gas-and-Nitrogen-Ambient-Temperature-Canister.html

We've used them, and have installed them, in a variety of applications for
the reasons you mentioned.

Dennis Schweiger
University of Michigan/LNF

734.647.2055 Ofc

On Thu, Jul 30, 2015 at 6:12 PM, Mark Heiden <mheiden at engr.ucr.edu> wrote:

> We are moving a sputtering system from a remote installation into our
> cleanroom and the intent has been to take it “off the bottle” and use the
> building process nitrogen system for process gas as well as venting. The
> bottles on the old install were 99.999% but the building process nitrogen
> is not certified to any exact number. The piping comes out of the 9000 gal.
> tank and through a vaporizer, then it goes through filters then splits into
> “house” nitrogen which is copper piping and “process” nitrogen which is all
> stainless steel with 10ra polished inside.
>
>
>
> From the stainless building process nitrogen line regulator, we ran high
> purity Teflon PFA tubing to the point of use filter on the MFC. Since I
> can’t provide a precise purity for the evaporated nitrogen gas coming from
> the bulk tank and the tubing from the regulator to the filters is not
> stainless, a PI that was using the system is terrified that the nitrogen
> won’t be pure enough. Could I get your opinions on what the purity may be
> expected to be and if it is less than 99.999% would the filters correct
> this anyway?
>
>
>
> I’m sure most operations that spent the money for a “process” nitrogen
> system are not then running everything on bottles anyway so how do you
> ensure that the nitrogen being delivered to the systems is pure enough?
>
>
>
> Thanks in advance,
>
>
>
>
>
> Mark Heiden
>
> NanoFab Cleanroom Manager
>
> Center for Nanoscale Science and Engineering
>
> University of California, Riverside
>
> 951-827-2551
>
>
>
>
>
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