[labnetwork] resist fluoresce

[Morrison, Richard H., Jr.]

Hi Everyone,

I am trying to figure out what wavelength I need for a Microscope to see positive resist fluoresce during an inspection step? Looking for scum and really thin resist on the surface after development.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

________________________________
Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper Laboratory. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
________________________________
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20150303/f88467de/attachment.html>