[labnetwork] resist fluoresce

[Shivakumar Bhaskaran]

I use yellow filter in my microscope. Our users inspect the photoresists coated wafer with yellow filters.

http://www.olympusmicro.com/primer/photomicrography/ccfilters/ccyellow.html

--Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Morrison, Richard H., Jr.
Sent: Tuesday, March 03, 2015 5:21 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] resist fluoresce

Hi Everyone,

I am trying to figure out what wavelength I need for a Microscope to see positive resist fluoresce during an inspection step? Looking for scum and really thin resist on the surface after development.

Rick


Draper Laboratory
Principal  Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com<http://www.draper.com>
rmorrison at draper.com<mailto:rmorrison at draper.com>
W 617-258-3420
C 508-930-3461

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