[labnetwork] Ni evaporation
Nathan Nelson - Fitzpatrick
nnelsonfitzpatrick at uwaterloo.ca
Mon Mar 23 09:18:42 EDT 2015
Hi Nava,
We have also experienced problems in our lab with Ni e-beam evaporation in VC or Al2O3 crucibles. We found that the VC crucibles would break down after a few deposition cycles (and would “tarnish” the Ni melt) and the one time we tried Al2O3 as a crucible liner it broke immediately upon removal from our E-beam hearth. We have settled on using Tungsten crucibles for our Ni e-beam evaporation. We have not observed any notable problems with this process and our first W crucible lasted for over two years before we needed to retire it.
Best regards,
-Nathan
--
Nathan Nelson-Fitzpatrick PhD
Nanofabrication Process Engineer
Quantum NanoFab
University of Waterloo
200 University Avenue West
Waterloo, ON Canada N2L 3G1
Ph: +1 519-888-4567 ext. 31796
From: Nava Ariel- Sternberg <anava at tauex.tau.ac.il<mailto:anava at tauex.tau.ac.il>>
Date: Monday, March 23, 2015 at 5:30 AM
To: "labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>" <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] Ni evaporation
Hi all,
We've came across some issues with Ni e-beam evaporation and thought of consulting the network:
Which crucible are you using for Ni e-beam evaporation? We've tried Al2O3 and Vitreous carbon, both recommended by the material/crucible suppliers.
Any tips with respect to melting the material or the evaporation process itself?
Thanks,
Nava
Nava Ariel-Sternberg, Ph.D.
Tel-Aviv University Center for Nanoscience and Nanotechnology, Managing Director
MNCF Manager
Phone: 03-640-5619
Mobile: 054-9984959
Email: anava at tauex.tau.ac.il<mailto:anava at tauex.tau.ac.il>
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