[labnetwork] LN2 vs N2 generation on site
Morrison, Richard H., Jr.
rmorrison at draper.com
Tue Mar 24 12:03:55 EDT 2015
Hi everyone,
I am paying >$220K per year for LN2 to generate Nitrogen for my fab. Have any of you guys switched to onsite Nitrogen generator?
Looking for ideas on:
Cost of system
Maintenance cost of system
Quality of the Nitrogen.
Operating cost per CuFt of Nitrogen
Rick
Draper Laboratory
Principal Member of the Technical Staff
Group Leader Microfabrication Operations
555 Technology Square
Cambridge Ma, 02139-3563
www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461
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