[labnetwork] Question re: parylene processing

[Robert M. HAMILTON]

I am forwarding a query from a colleague to see if someone reading the
labnetwork has experience and recommendations about this parylene issue:

*Papers show paryleneC becomes crystalline, tensile & cracks when baked
above 80C in atmosphere, simple tests on hot plates confirm this finding.
Does anyone have experience when paryleneC is exposed to a resist bake
after resist is coated on top of the parylene? *

*If you do have this experience, with a resist coating and bake on a
parylene substrate, what was the temperature exposure and ambient?   Did
the parylene crack or change properties during the bake?*

*Or, was the resist bake done in an N2 or Ar or vacuum environment & what
was the temperature exposure of the bake?*

Regards,
Bob Hamilton

Robert Hamilton
University of CA, Berkeley
Marvell NanoLab Equipment Manager
Rm 520 Sutardja Dai Hall, MC 1754
Berkeley, CA 94720
Phone 510-809-8618 (desk - preferred)
Mobile 510-325-7557 (my personal mobile)
E-mail preferred: bob at eecs.berkeley.edu
http://nanolab.berkeley.edu/
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