[labnetwork] Sputtering of AlScN

[Matt Moneck]

Hi All,

 

We have recently had a request in our facility to reactively sputter AlScN,
either from an AlSc target or from co-sputtering of Al and Sc in an Ar/N2
environment.  However, scandium is not a material that we have previously
dealt with.  The various MSDS I've read suggest there is little concern over
toxicity, but I am also concerned about chamber contamination and
incompatibility with other materials.  Has anyone had experience with this
material in their vacuum systems? 

 

Best Regards,

 

Matt

 

-- 
Matthew T. Moneck, Ph.D.
Executive Manager, Carnegie Mellon Nanofabrication Facility
Electrical and Computer Engineering | Carnegie Mellon University
5000 Forbes Ave., Pittsburgh, PA 15213-3890
T: 412.268.5430
F: 412.268.3497
 <http://www.ece.cmu.edu> www.ece.cmu.edu
nanofab.ece.cmu.edu

 

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