[labnetwork] How do you handle PDMS in a cleanroom environment?

[Leif Johansen]

Dear Lab Network,

I have a dilemma. Polydimethylsiloxane (PDMS) is a promising material for soft lithography, and a lot of our users have a strong wish to process this material in our lab - especially for making nanoimprint stamps . However, before being cured, PDMS is basically a silicone oil, and all our front end engineers (plasma chambers, lithography etc. ) are really scared about this substance ending up in their equipment. Our back end engineers (especially the wire bonding engineer) is also strongly opposed to the introduction of PDMS into the back end lab.

Are there any experience out there in the community on how to handle PDMS in a cleanroom environment?

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

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Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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