[labnetwork] How do you handle PDMS in a cleanroom environment?

[Mark Giulio Chiappa]

Hi Leif,

We have PDMS in the ISO 7 area of our cleanroom.  Obviously we have a strict regime for this.  All work is carried out in a designated fume hood. Uncured PDMS is only permitted in that fume hood.  Users must wear an extra pair of gloves and often sleeve protectors when working with PDMS and remove them immediately after PDMS work.
All PDMS equipment is clearly marked and all users, even the untrained PDMS users are made aware of the dangers PDMS represents and are told not to touch anything from the PDMS area.

The responsible engineer is Mathilde you could contact her directly if you would like to have more information on the routines in the area.  mathilde.i.barriet at ntnu.no<mailto:mathilde.i.barriet at ntnu.no> .

Kind regards
Mark

Mark Chiappa
NTNU NanoLab
Sem Sælandsvei 14
7491 Trondheim
Mob: +47 918 97 617



From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Leif Johansen
Sent: 25. november 2015 09:58
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] How do you handle PDMS in a cleanroom environment?

Dear Lab Network,

I have a dilemma. Polydimethylsiloxane (PDMS) is a promising material for soft lithography, and a lot of our users have a strong wish to process this material in our lab - especially for making nanoimprint stamps . However, before being cured, PDMS is basically a silicone oil, and all our front end engineers (plasma chambers, lithography etc. ) are really scared about this substance ending up in their equipment. Our back end engineers (especially the wire bonding engineer) is also strongly opposed to the introduction of PDMS into the back end lab.

Are there any experience out there in the community on how to handle PDMS in a cleanroom environment?

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>



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