[labnetwork] Fluorescent Lamp Replacement with LED lamps in the Cleanroom?

Gregory Cibuzar cibuzar at umn.edu
Wed Sep 23 08:53:14 EDT 2015


Tom,
See below for a response I made to a similar inquiry to labnetwork from
last spring.  I might add that we used G10 yellow film from Encapsulite for
the filtering.
Greg

--------------------------------------------------------------------------------

A few years ago we replaced 630 40 watt T12 florescent lamps in our
cleanroom with 20 watt T8 LED lamps from Phillips.  The T12 lamps had to go
since they were being phased out of production.  We looked at moving to T8
fluorescents, but that would have required considerable rewiring to replace
all the remote ballasts that worked with the T12 lamps but would not work
with the T8 lamps.  Our local energy company had a rebate program for LED
lighting, and that combined with the energy savings convinced our energy
management department to fund the replacement.  The LED lamps did not
require a ballast, only some minor rewiring to route line voltage to the
fixtures.  It took a few electricians 3-4 days to do the work, but in the
end it worked out pretty well.  After 3 years we have not lost a lamp.  The
energy management team told me together with the occupancy sensors that
were also added we were saving around $13K/yr in energy costs.

Here is a link to the LED lamps we used:
http://www.lighting.philips.com/pwc_li/us_en/connect/tools_literature/downloads/p-6206.pdf

Before we agreed to this change, we investigated the resist exposure
issue.  Our T12 lamps had the yellow sleeves, but we did not want to go
with these sleeves on the LED T8 lamps due to concerns that the lamp temp
would rise too high and reduce the lifetime.  Instead we ended up buying
some UV filtering film (we tested several for resist exposure) and manually
cutting pieces to snugly fit inside the plastic housing surrounding the
lamp (we have the old "teardrop" style lights in that cleanroom).  That was
a pain to do, but in the end it worked pretty well.

Regards,
Greg

Greg Cibuzar
Manager, Minnesota Nano Center
www.mnc.umn.edu
University of Minnesota
612-625-8079

On Tue, Sep 22, 2015 at 1:30 PM, Tribble, Thomas A. <tribble at fas.harvard.edu
> wrote:

> The replacement of T-8 and T-5 fluorescent lamps outside the cleanroom is
> becoming an increasingly popular Facilities practice.  Has there been any
> experience with this kind of retrofit inside the cleanroom? Specifically,
> in Lithography and other UV sensitive areas of the cleanroom, have there
> been any observed (or anticipated) adverse effects from the use of LED
> lamps?
>
>
>
> Thanks . . . Tom
>
>
>
> *Thomas A Tribble PE, JD | Northwest 102.32 | 52 Oxford Street |
> Cambridge, MA 02138 | (tel) 617 495 0990 <617%20495%200990> |(cell) 617 780
> 5685 <617%20780%205685> |*
>
>
>
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