[labnetwork] looking for some references

[Noah Clay]

Rick,

We have a new Gen3 MA6 with backside align from Suss MicroTec.  Uptime/reliability is excellent and post sales support has been as well.  The system is PM'd twice annually by Suss.  

Imaging quality is standard for a mask aligner.  My staff don't have to do much to get illumination uniformity less than +/- 2.5% over 150 mm after a lamp change (1000 W light source).  We mainly use the system for 100 mm wafer, piece work and some 150 mm processing.  

All thumbs-up here at Penn.

Best,
Noah

University of Pennsylvania 
Philadelphia, PA

Sent from my iPhone

> On Apr 1, 2016, at 14:54, Morrison, Richard H., Jr. <rmorrison at draper.com> wrote:
> 
> HI,
>  
> This group was very helpful when Draper purchased a DRIE tool last year. I would like to tap your collective opinions on a new topic Mask Aligners.
>  
> We have narrowed our search down to Suss vs Neutronix/Quintel. I am looking for feedback on spare parts and out of warranty service. Process wish the tools are very similar.
>  
> Thanks in advance for any help you can offer.
>  
> Rick
>  
> Draper
> Principal  Member of the Technical Staff
> 555 Technology Square
> Cambridge Ma, 02139-3563
>  
> www.draper.com
> rmorrison at draper.com
> W 617-258-3420
> C 508-930-3461
>  
> Notice: This email and any attachments may contain proprietary (Draper non-public) and/or export-controlled information of Draper. If you are not the intended recipient of this email, please immediately notify the sender by replying to this email and immediately destroy all copies of this email.
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