[labnetwork] Bismuth Deposition

[Beall, James A. (Fed)]

We did this occasionally in our ebeam system. We made the user wrap the shutter and some hard to clean parts in foil to minimize the mess.

It takes hardly any emission current to get a high rate - go very slowly, the spot is hard to see.


In the end we built a simple thermal evaporator and use an alumina crucible in a W or Ta oven heater.


Jim

________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of J Romans <hromans at eng.ucsd.edu>
Sent: Thursday, August 4, 2016 12:46:11 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Bismuth Deposition

Hello Esteemed Colleagues -

We have a research group that is interested in depositing Bismuth. We are leaning towards allowing this in an ebeam evaporator, but sputtering is also a possibility.

Is anyone aware of any pitfalls or tips associated with either method of deposition? Bi has health and flammability ratings of 1 ( compare Cr with health 2 and flammability 1, which we do a lot of).

We are more concerned with the physical characteristics that might cause splattering, contamination, incompatibilities with other processes, difficulty cleaning shielding, etc.

Any information would be greatly appreciated.

Thanks,
Hal Romans
Senior Equipment Engineer
University of California San Diego
Nano 3 Cleanroom

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