[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

[Kevin Owen]

Vito,

We have both of those tools and on both we interlocked the power to the
touch screen. On our CV200RFS, we put TB10 pin 1 on a relay connected to
our interlocking system. I did not open up the 310TA, but it's the same
idea.

-Kevin

On Mon, Feb 8, 2016 at 4:53 PM, Vito Logiudice <vito.logiudice at uwaterloo.ca>
wrote:

> Dear Colleagues,
>
> I’d greatly appreciate hearing from those of you whom have devised ways of
> safely interlocking a couple of systems we’re currently working on. These
> include the following:
>
> Oxygen plasma strip system:
> http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf
> HMDS prime oven:
> http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf
>
> Thank you very much for any insights.
>
> Best regards,
> Vito
> --
> Vito Logiudice  P.Eng.
> Director of Operations, Quantum NanoFab
> University of Waterloo
> Lazaridis QNC 1207
> 200 University Avenue West
> Waterloo, ON           Canada N2L 3G1
> Tel.: (519) 888-4567  ext. 38703
> Email: vito.logiudice at uwaterloo.ca
> Website: https://fab.qnc.uwaterloo.ca
>
>
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>


-- 
Kevin Owen
Senior Engineer in Research
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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