[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

[julia.aebersold at louisville.edu]

We interlock the 110V pump on our YES HMDS Prime/Image Reversal systems.

Cheers!

Julia Aebersold, Ph.D.
Cleanroom Manager
Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin Owen
Sent: Tuesday, February 9, 2016 2:56 PM
To: Vito Logiudice <vito.logiudice at uwaterloo.ca>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

Vito,

We have both of those tools and on both we interlocked the power to the touch screen. On our CV200RFS, we put TB10 pin 1 on a relay connected to our interlocking system. I did not open up the 310TA, but it's the same idea.

-Kevin

On Mon, Feb 8, 2016 at 4:53 PM, Vito Logiudice <vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>> wrote:
Dear Colleagues,

I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the following:

Oxygen plasma strip system: http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.yieldengineering.com_Portals_0_YES-2DCV200RFS-5Fspecs.pdf&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=QifV8BzRQjA0pgYYet75vG_P5JXOQeBqfUFTMorU2NQ&s=enfFSOO980lLva20xwbL9BbYfW7nTDHq9DIvgfgoaYo&e=>
HMDS prime oven: http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.yieldengineering.com_Portals_0_YES-2D310TA-5Fspecs.pdf&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=QifV8BzRQjA0pgYYet75vG_P5JXOQeBqfUFTMorU2NQ&s=RlS5Ih7QyM5ZxYH35qiqvTEsyZ0oVFIbH_EH9BcL6OU&e=>

Thank you very much for any insights.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703<tel:%28519%29%20888-4567%20%C2%A0ext.%2038703>
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca<https://urldefense.proofpoint.com/v2/url?u=https-3A__fab.qnc.uwaterloo.ca&d=AwMFaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=QifV8BzRQjA0pgYYet75vG_P5JXOQeBqfUFTMorU2NQ&s=jkOWnu4foc2RNKb-vjM2_PlyZjwpi6l2rGJQa6gWC0I&e=>


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--
Kevin Owen
Senior Engineer in Research
Operations Group, Lurie Nanofabrication Facility
University of Michigan
(734) 545-4014
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