[labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

[Leif Johansen]

Hello Vito,

We have plasma ashers from TePla. We have interlocked the “Enter” and “Run” buttons.

We have a YES-310TA identical to yours. We have interlocked the valve on the HMDS line. If you are interested, we can send a sketch of the solution. A few people have forgotten to log in and only discovered their mistake when their patterns fell off the wafer during development.  A bit unfortunate, but a good way to teach people that they should log on to equipment.

Best regards,
Leif

Leif S. Johansen

Head of Operations

DTU Danchip



Technical University of Denmark

[http://www.dtu.dk/images/DTU_email_logo_01.gif]

Danchip

Ørsteds Plads, Byg. 347

2800  Lyngby

Direct +45 45255713
Mobile +45 25348992

lesjo at danchip.dtu.dk<mailto:lesjo at danchip.dtu.dk>

www.danchip.dtu.dk/<http://www.danchip.dtu.dk/>






From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Vito Logiudice
Sent: 8. februar 2016 22:54
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Suggestions for interlocking O2 plasma & HMDS systems

Dear Colleagues,

I’d greatly appreciate hearing from those of you whom have devised ways of safely interlocking a couple of systems we’re currently working on. These include the following:

Oxygen plasma strip system: http://www.yieldengineering.com/Portals/0/YES-CV200RFS_specs.pdf
HMDS prime oven: http://www.yieldengineering.com/Portals/0/YES-310TA_specs.pdf

Thank you very much for any insights.

Best regards,
Vito
--
Vito Logiudice  P.Eng.
Director of Operations, Quantum NanoFab
University of Waterloo
Lazaridis QNC 1207
200 University Avenue West
Waterloo, ON           Canada N2L 3G1
Tel.: (519) 888-4567  ext. 38703
Email: vito.logiudice at uwaterloo.ca<mailto:vito.logiudice at uwaterloo.ca>
Website: https://fab.qnc.uwaterloo.ca

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