[labnetwork] Chips on a EVG 620

[Jacob Trevino]

Hello All,

At the CUNY ASRC NanoFab, we have a EVG 620 mask aligner with 6” and 4” wafer tooling. We have a number of users who need to process chips of varying sizes. In some cases, users need the flexibility to move the chip across the mask. As I am sure you are familiar, many researchers have several chip layers across one photomask.

It seems as though EVG’s tooling options for chips are fairly limited with less flexibility than I have seen with SUSS chucks in the past. I am curious what other EVG mask aligner owners do to accommodate users who need to perform lithography on chips. Have you made your own custom tooling? Any thoughts would be greatly appreciated.

Best regards,
Jacob


--------------------------------
Jacob Trevino, PhD
NanoFabrication Facility Director
The City University of New York (CUNY)
Advanced Science Research Center (ASRC)
Tel.  (212) 413-3310<tel:%28212%29%20413-3310>
Cel.  (646) 629-1179<tel:%28646%29%20629-1179>
Email: Jacob.Trevino at asrc.cuny.edu<mailto:Jacob.Trevino at asrc.cuny.edu>
Web: http://asrc.cuny.edu/


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