[labnetwork] Lithium Compound target in the Sputtering

[Nava Ariel Sternberg]

Dear Shiva,

I sputtered both materials in grad school. but I wasn't using a clean
sputtering system. There are no special safety considerations (the lithium
in these compounds is stable and is not reactive with N2 or moisture as
elemental lithium) but the contamination of other metals deposited in the
same system is a valid concern. I would use a less clean system for that if
you have one.

Hope this helps,

Nava


Nava Ariel-Sternberg, Ph.D.
Director of CNI Facilities
Columbia University
530 W120th Street, NY 10027
Room 1020/MC 8903
Office: 212-854-9927
Cell: 201-562-7600


On Mon, Feb 15, 2016 at 10:50 AM, Shivakumar Bhaskaran <sbhas at uchicago.edu>
wrote:

>
>
> Due to interest of fabricating battery device, we have users requesting
> for sputtering LiCoO2 and Li3PO4.
>
>
>
> Have anyone used this materials in your sputtering system. Will this
> material have contamination issue with other processes (mostly metals). Do
> I need to follow any safety procedures before/after sputtering.
>
>
>
> Thanks
>
> -Shiva
>
>
>
>
>
> Shivakumar Bhaskaran, Ph.D.
>
> Searle CleanRoom Manager
>
> The University of Chicago
>
> 5735 S.Ellis, Room 032
>
> Chicago-60637
>
> Ph:773-795-2297
>
> https://searle-cleanroom.uchicago.edu/
>
>
>
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>
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