[labnetwork] Chips on a EVG 620

[Fouad Karouta]

Hi Jacob,

Indeed the EVG 620 is not as flexible as the Suss MA6 for instance. We do have an EVG620 and similarly to your case we have people working with small samples and therefore we purchased a mask chuck with a 55mm dia opening allowing user to position the mask to the desired pattern. You need the chuck and the corresponding loading frame. In parallel you also need to have a sample chuck holder for small pieces. We do have one for 2” (EVG said it works for small pieces) but due to the vacuum grooves working with 10x10 mm2 sample will not give you the best resolution as sample cannot be clamped with vacuum. Maybe EVG offers now more suitable chuck for small pieces.
Along all these hardware tools you also need a software upgrade (service visit) to include these parts in the software. A rather expensive upgrade.

Let me know if you need more details on this that we do it outside the labnetowrk.

Kind regards,
Fouad Karouta
ANFF ACT Node Manager

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jacob Trevino
Sent: Wednesday, 17 February 2016 1:06 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Chips on a EVG 620

Hello All,

At the CUNY ASRC NanoFab, we have a EVG 620 mask aligner with 6” and 4” wafer tooling. We have a number of users who need to process chips of varying sizes. In some cases, users need the flexibility to move the chip across the mask. As I am sure you are familiar, many researchers have several chip layers across one photomask.

It seems as though EVG’s tooling options for chips are fairly limited with less flexibility than I have seen with SUSS chucks in the past. I am curious what other EVG mask aligner owners do to accommodate users who need to perform lithography on chips. Have you made your own custom tooling? Any thoughts would be greatly appreciated.

Best regards,
Jacob


--------------------------------
Jacob Trevino, PhD
NanoFabrication Facility Director
The City University of New York (CUNY)
Advanced Science Research Center (ASRC)
Tel.  (212) 413-3310<tel:%28212%29%20413-3310>
Cel.  (646) 629-1179<tel:%28646%29%20629-1179>
Email: Jacob.Trevino at asrc.cuny.edu<mailto:Jacob.Trevino at asrc.cuny.edu>
Web: http://asrc.cuny.edu/


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