[labnetwork] EVG 620 Mask Aligner issue

[julia.aebersold at louisville.edu]

Just a side comment on this thread for we have a Suss MA6/BA6.

We used to run in constant power mode, but our clients always had to adjust their exposure durations as the bulb degraded.  We changed to constant intensity mode and results are much more consistent all the time.  When our controller starts to howl when it can’t deliver the intensity needed or we reach our time limit then we change the lamp.

Just my $0.02.

Cheers!

Julia Aebersold, Ph.D.
Cleanroom Manager
Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292

502-852-1572
http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: Thursday, January 14, 2016 12:43 PM
To: Rob Vandusen <rvanduse at doe.carleton.ca>; 'Mario Portillo' <hbtusainc at yahoo.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

We run at constant power mode.

-Thanks
-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/

From: Rob Vandusen [mailto:rvanduse at doe.carleton.ca]
Sent: Thursday, January 14, 2016 11:31 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>; 'Mario Portillo' <hbtusainc at yahoo.com<mailto:hbtusainc at yahoo.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: RE: [labnetwork] EVG 620 Mask Aligner issue

Not sure if you are running your system in constant power or constant intensity mode,  but if it is in constant intensity it may be limiting the power.

Rob.
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600 ext 5761
rvanduse at doe.carleton.ca<mailto:rvanduse at doe.carleton.ca>



From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Shivakumar Bhaskaran
Sent: January-14-16 10:21 AM
To: Mario Portillo <hbtusainc at yahoo.com<mailto:hbtusainc at yahoo.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

The controller has interlock, the lamp will turn ON only if the cooling and air is ON, may be I can bypass the interlock will check with EVG regarding this.
Thanks
-Shiva


Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297
https://searle-cleanroom.uchicago.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__searle-2Dcleanroom.uchicago.edu_&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=iCXJtOshsWYbnf0B4CIWYAWIf1zmaOojU-eCzpoty7Q&e=>

From: Mario Portillo [mailto:hbtusainc at yahoo.com]
Sent: Thursday, January 14, 2016 6:10 AM
To: Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] EVG 620 Mask Aligner issue

Shiva, a few suggestions ; make sure lamp is installed correctly, anode side down, anode/ cathode connections nice n tight at the light source n power supply, over cooling ??? Turn cooling off n turn lamp on, for a 500W lamp the normal operating voltage should be around average of 60vdc and 8.5 amps, last but not least .. A bad batch of lamps ??? I have seen this a few times thru the years...

I hope this helps..... Regards


Sent from Yahoo Mail for iPhone<https://urldefense.proofpoint.com/v2/url?u=https-3A__yho.com_footer0&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=5adl3RBTEDJZLJN_p0uM6hyfogPaNjNRa9XTkbutsPE&e=>

On Wednesday, January 13, 2016, 4:52 PM, Shivakumar Bhaskaran <sbhas at uchicago.edu<mailto:sbhas at uchicago.edu>> wrote:
The lamp in the mask aligner is not reaching 500W its stays at 150W. I did send the power supply to EVG to test it in their unit and it works fine. I changed the bulbs and still the same issue. Does anyone had faced similar issue in your Mask Aligner.

-Thanks
-Shiva

Shivakumar Bhaskaran, Ph.D.
Searle CleanRoom Manager
The University of Chicago
5735 S.Ellis, Room 032
Chicago-60637
Ph:773-795-2297<tel:773-795-2297>
https://searle-cleanroom.uchicago.edu/<https://urldefense.proofpoint.com/v2/url?u=https-3A__searle-2Dcleanroom.uchicago.edu_&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=iCXJtOshsWYbnf0B4CIWYAWIf1zmaOojU-eCzpoty7Q&e=>

_______________________________________________
labnetwork mailing list
labnetwork at mtl.mit.edu<javascript:return>
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://urldefense.proofpoint.com/v2/url?u=https-3A__www-2Dmtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=AwMGaQ&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=dinfzkbAbqkWVX3xF1fcv2PCcim1G4Oe9iPy5r31AUk&m=maSU4kYVUB_arEtqsFvKf4Q9ZhZXD0JldeVKK69LgOA&s=BfuE3eNERjWzhU8SArrBnWFKly6yjg6-KPIMks6sItQ&e=>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20160114/81c14388/attachment.html>