[labnetwork] STS ASE Electrostatic Chuck

[Bruce Tolleson]

Dear Labnetwork,
Does anyone know the electrostatic chuck or have prints for the clamping circuit for an STS ASE deep RIE system?
We can manually tell the clamp to come on but it won't come on running a recipe. We suspect it may be a programming issue but we lack the info to correct it.
Can anyone help?

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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