[labnetwork] need help with photolithography

[Morrison, Richard H., Jr.]

HI,

I am working on a project that requires photolith at 100nm, I have access to an E-Beam but I was wondering if anybody has DUV stepper for 150mm wafers working at 100nm line space that Draper could use.

Thanks in advance.

Rick


Draper
Principal  Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563

www.draper.com
rmorrison at draper.com
W 617-258-3420
C 508-930-3461

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