[labnetwork] Sputter process query

[sunanda.babu at cense.iisc.ernet.in]

Hi all,

Can someone tell me whether there are any cross-contamination issues if I
mix reactive sputtering of AlN, TiN, HfO2, Ta2O5, ITO on my sputter tool?

Can I mix metal sputtering and dielectric sputtering processes? Based on
this information, I would like to see if the tool utilization can be
improved.

thanks and best regards,
sunanda


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