[labnetwork] Bubble defects in Ebeam evaporated gold

[Jim Fraser]

Do you use an adhesion layer on your substrate under your Au layer?

Thanks,

Jim Fraser
Integrated Microfabrication Laboratory Manager
Brigham Young University
________________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of sunanda.babu at cense.iisc.ernet.in <sunanda.babu at cense.iisc.ernet.in>
Sent: Saturday, July 23, 2016 6:30 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Bubble defects in Ebeam evaporated gold

Hi all,

We see bubble like defects in e-beam evaporated gold. One of the suspect
is the graphite crucible that we are currently using.

We see small gold nodules sticking to the walls of the graphite crucible.
These crucibles were procured from Testbourne(Glossy coated Graphite
crucible). The one we are using currently for gold evaporation is almost 2
years old. I was wondering whether there is a lifetime for these
crucibles.Do we use these crucibles until they crack? Does the glossy
coating degrade with time? Does the C start to contaminate the gold? I
plan to do an EDX analysis on this gold.

Has someone on Labnetwork faced a similar issue? Can you please advise?

thanks and best regards,
Sunanda Babu
Technology Manager(Thin Films and Dry Etch),
National Nanofabrication Centre,
Centre for Nanoscience and Engineering,
Indian Institute of Science, Bangalore, India



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