[labnetwork] Bubble defects in Ebeam evaporated gold

sunanda.babu at cense.iisc.ernet.in sunanda.babu at cense.iisc.ernet.in
Sat Jul 23 09:57:23 EDT 2016


Yes, we do.

Do you use an adhesion layer on your substrate under your Au layer?
>
> Thanks,
>
> Jim Fraser
> Integrated Microfabrication Laboratory Manager
> Brigham Young University
> ________________________________________
> From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on
> behalf of sunanda.babu at cense.iisc.ernet.in
> <sunanda.babu at cense.iisc.ernet.in>
> Sent: Saturday, July 23, 2016 6:30 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Bubble defects in Ebeam evaporated gold
>
> Hi all,
>
> We see bubble like defects in e-beam evaporated gold. One of the suspect
> is the graphite crucible that we are currently using.
>
> We see small gold nodules sticking to the walls of the graphite crucible.
> These crucibles were procured from Testbourne(Glossy coated Graphite
> crucible). The one we are using currently for gold evaporation is almost 2
> years old. I was wondering whether there is a lifetime for these
> crucibles.Do we use these crucibles until they crack? Does the glossy
> coating degrade with time? Does the C start to contaminate the gold? I
> plan to do an EDX analysis on this gold.
>
> Has someone on Labnetwork faced a similar issue? Can you please advise?
>
> thanks and best regards,
> Sunanda Babu
> Technology Manager(Thin Films and Dry Etch),
> National Nanofabrication Centre,
> Centre for Nanoscience and Engineering,
> Indian Institute of Science, Bangalore, India
>
>
>
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