[labnetwork] Bubble defects in Ebeam evaporated gold

[sunanda.babu at cense.iisc.ernet.in]

Thank you all for the valuable feedback.

best regards,
sunanda



 Hi Sunanda,
>
> We had similar issues in the past with a Fabmate (i.e. graphite) crucible.
> We had the same gold nodules on the side of the crucible and we had
> similar
> "bubbles" in some of our films.  We also saw carbon residue on the Au
> charge.  After discussing with some companies, our Process Engineer
> prompted
> the switch to a tungsten crucible and it solved all of our problems.  The
> bubbles and nodules went away, and the the sheet resistance of our films
> improved.  Tungsten is more expensive, but it is worth it in my opinion.
>
> Best Regards,
>
> Matt
>
> --
> Matthew T. Moneck, Ph.D.
> Executive Manager, Carnegie Mellon Nanofabrication Facility
> Electrical and Computer Engineering | Carnegie Mellon University
> 5000 Forbes Ave., Pittsburgh, PA 15213-3890
> T: 412.268.5430
> F: 412.268.3497
> www.ece.cmu.edu
> nanofab.ece.cmu.edu
>
> -----Original Message-----
> From: labnetwork-bounces at mtl.mit.edu
> [mailto:labnetwork-bounces at mtl.mit.edu]
> On Behalf Of sunanda.babu at cense.iisc.ernet.in
> Sent: Saturday, July 23, 2016 8:31 AM
> To: labnetwork at mtl.mit.edu
> Subject: [labnetwork] Bubble defects in Ebeam evaporated gold
>
> Hi all,
>
> We see bubble like defects in e-beam evaporated gold. One of the suspect
> is
> the graphite crucible that we are currently using.
>
> We see small gold nodules sticking to the walls of the graphite crucible.
> These crucibles were procured from Testbourne(Glossy coated Graphite
> crucible). The one we are using currently for gold evaporation is almost 2
> years old. I was wondering whether there is a lifetime for these
> crucibles.Do we use these crucibles until they crack? Does the glossy
> coating degrade with time? Does the C start to contaminate the gold? I
> plan
> to do an EDX analysis on this gold.
>
> Has someone on Labnetwork faced a similar issue? Can you please advise?
>
> thanks and best regards,
> Sunanda Babu
> Technology Manager(Thin Films and Dry Etch), National Nanofabrication
> Centre, Centre for Nanoscience and Engineering, Indian Institute of
> Science,
> Bangalore, India
>
>
>
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