[labnetwork] Bubble defects in Ebeam evaporated gold

[J Romans]

Another downside (besdies cost) is Au sticks to W - not a big problem for
most.
-Hal


On Sat, Jul 23, 2016 at 3:09 PM, Michael Rooks <michael.rooks at yale.edu>
wrote:

> Matt is right. It is well known that gold will form clumps around carbon
> particles. It's easy to evaporate some of the carbon crucible accidentally,
> and so it's important to use either Mo or W crucibles. Either type of
> crucible will cost a lot less than the gold you put in it. By the way,
> you'll have to throw out the contaminated gold.
>
> ----------------------------------
> Michael Rooks
> Yale Institute of Nanoscience and Quantum Engineering
> nano.yale.edu
>
>
>
> On 7/23/16 11:40 AM, Matt Moneck wrote:
>
> Hi Sunanda,
>
> We had similar issues in the past with a Fabmate (i.e. graphite) crucible.
> We had the same gold nodules on the side of the crucible and we had similar
> "bubbles" in some of our films.  We also saw carbon residue on the Au
> charge.  After discussing with some companies, our Process Engineer prompted
> the switch to a tungsten crucible and it solved all of our problems.  The
> bubbles and nodules went away, and the the sheet resistance of our films
> improved.  Tungsten is more expensive, but it is worth it in my opinion.
>
> Best Regards,
>
> Matt
>
>
>
>
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