[labnetwork] Bubble defects in Ebeam evaporated gold

[Michael Rooks]

Matt is right. It is well known that gold will form clumps around carbon 
particles. It's easy to evaporate some of the carbon crucible 
accidentally, and so it's important to use either Mo or W crucibles. 
Either type of crucible will cost a lot less than the gold you put in 
it. By the way, you'll have to throw out the contaminated gold.


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Michael Rooks
Yale Institute of Nanoscience and Quantum Engineering
nano.yale.edu <http://nano.yale.edu>



On 7/23/16 11:40 AM, Matt Moneck wrote:
> Hi Sunanda,
>
> We had similar issues in the past with a Fabmate (i.e. graphite) crucible.
> We had the same gold nodules on the side of the crucible and we had similar
> "bubbles" in some of our films.  We also saw carbon residue on the Au
> charge.  After discussing with some companies, our Process Engineer prompted
> the switch to a tungsten crucible and it solved all of our problems.  The
> bubbles and nodules went away, and the the sheet resistance of our films
> improved.  Tungsten is more expensive, but it is worth it in my opinion.
>
> Best Regards,
>
> Matt
>

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