[labnetwork] cleaning sulfur from DRIE coldtrap

[Beall, James A. (Fed)]

Hi Mark,

I have used the brute force method and it is unpleasant. A field service engineer once told me he had heard you could freeze the gunked up parts in LN2 and then it would crack off but I have not tried that yet.

I am curious what you use as a cold trap as I would like to do more to keep that stuff out of our dry pumps.

Thank you,

  - Jim



On Jun 1, 2016, at 12:00 PM, Mark Morgan <mmorgan3 at uw.edu<mailto:mmorgan3 at uw.edu>> wrote:

Greetings all -

is there a preferred procedure for cleaning sulfur deposits from a DRIE cold trap and unheated length of roughing line? i am reticent to apply a ‘brute-force’ method when a more elegant solution is available (and perhaps using the word ‘elegant’ regarding sulfur cleaning is mis-guided…)  but even still, i am open to suggestions.

thank you so much

best regards

Mark





Mark D. Morgan
Research Engineer, Washington Nanofabrication Facility (WNF)
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington
Fluke Hall 132, Box 352143
(206) 221-6349
mmorgan3 at uw.edu<mailto:mmorgan3 at uw.edu>
http://www.wnf.washington.edu/

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