[labnetwork] Turbo pump failure

[Tzu-Min Ou]

Good day,

Just wanted to thank Utah Nanofab's hospitality and all the participants'
selfless sharing. The UGIM in U. of Utah was a wonderful experience for
a first-time attendee.

Back to reality, the turbo pump (Leybold Turbovac 361 C with mechanical
rotor suspension) on our RIE system was making a loud high-pitched sound,
and the controller showed a "failure" status. This turbo pump has been on
all the time for the past 2-3 years, except for few unexpected power
outage. I am curious if anyone had this kind of turbo pump failure before?
What would be the possible causes of the failure?

In addition to that, I am seeking some professional suggestions on how to
fix it. Would you recommend to replace the bearing by the professionals, or
can this be done by myself (only watched youtube video and it looked quite
complicated)? I will deeply appreciate if anyone can share the names
of reliable inexpensive repairers and/or the vendors of the repair kit.

Thank you,

Tzu-Min

-- 
Tzu-Min Ou, Ph.D.
Lab Manager
Colorado Nanofabrication Laboratory
Department of Electrical, Computer, and Energy Engineering
University of Colorado at Boulder
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