[labnetwork] Turbo pump failure

[John D Shott]

Tzu-Min:

You didn't mention: Is this turbo heated? Or can it be?

In most etch applications, I believe that most agree that a heated pump increases pump lifetime by reducing deposition on the turbines.   If this pump is already heated, I apologize for mentioning this.

But I agree with others: a turbo rebuilt is not a do it yourself project.

Good luck,

John

Sent from my iPhone

On Jun 21, 2016, at 3:02 PM, "Tzu-Min Ou" <Tzumin.Ou at Colorado.EDU<mailto:Tzumin.Ou at Colorado.EDU>> wrote:

Good day,

Just wanted to thank Utah Nanofab's hospitality and all the participants' selfless sharing. The UGIM in U. of Utah was a wonderful experience for a first-time attendee.

Back to reality, the turbo pump (Leybold Turbovac 361 C with mechanical rotor suspension) on our RIE system was making a loud high-pitched sound, and the controller showed a "failure" status. This turbo pump has been on all the time for the past 2-3 years, except for few unexpected power outage. I am curious if anyone had this kind of turbo pump failure before? What would be the possible causes of the failure?

In addition to that, I am seeking some professional suggestions on how to fix it. Would you recommend to replace the bearing by the professionals, or can this be done by myself (only watched youtube video and it looked quite complicated)? I will deeply appreciate if anyone can share the names of reliable inexpensive repairers and/or the vendors of the repair kit.

Thank you,

Tzu-Min

--
Tzu-Min Ou, Ph.D.
Lab Manager
Colorado Nanofabrication Laboratory
Department of Electrical, Computer, and Energy Engineering
University of Colorado at Boulder
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